DEFECT CHARACTERISTICS AND GENERATION MECHANISM IN A BIRD BEAK FREE STRUCTURE BY SIDEWALL MASKED TECHNIQUE

被引：9

作者：

FANG, RCY

CHIU, KY

MOLL, JL

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 01期

关键词：

D O I：

10.1149/1.2119655

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：190 / 196

页数：7

共 15 条

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