A COMPARISON OF SPUTTERED NI/CR INTERFACE DEPTH RESOLUTION AS OBTAINED BY THE QUARTZ CRYSTAL MICROBALANCE MASS-LOSS METHOD AND AUGER-SPECTROSCOPY

被引:4
作者
NAVINSEK, B [1 ]
PANJAN, P [1 ]
ZABKAR, A [1 ]
机构
[1] NBS, DIV SURFACE SCI, GAITHERSBURG, MD 20899 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1985年 / 3卷 / 03期
关键词
D O I
10.1116/1.573277
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:671 / 673
页数:3
相关论文
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