HIGH QUANTUM EFFICIENCY MONOLITHIC ARRAYS OF SURFACE-EMITTING ALGAAS DIODE-LASERS WITH DRY-ETCHED VERTICAL FACETS AND PARABOLIC DEFLECTING MIRRORS

被引：6

作者：

DONNELLY, JP

GOODHUE, WD

BAILEY, RJ

LINCOLN, GA

WANG, CA

JOHNSON, GD

机构：

[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 13期

关键词：

D O I：

10.1063/1.107524

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Monolithic arrays of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and external parabolic deflecting mirrors have been operated with both short and quasi-cw current pulses. The arrays emit at 804 nm with threshold current densities as low as 220 A/cm2 and differential quantum efficiencies as high as 66%. The vertical facets and parabolic deflecting mirrors were formed by using chlorine ion-beam-assisted etching with standard photolithography.

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收藏

页码：1487 / 1489

页数：3

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