AN ATOM-PROBE COMPOSITIONAL STUDY OF PD-SI INTERFACES

被引：3

作者：

SAKATA, T ^{[1
]}

HASEGAWA, Y ^{[1
]}

KOBAYASHI, A ^{[1
]}

SAKURAI, T ^{[1
]}

机构：

[1] UNIV TOKYO,INST SOLID STATE PHYS,TOKYO 106,JAPAN

来源：

JOURNAL DE PHYSIQUE | 1986年 / 47卷 / C-7期

关键词：

D O I：

10.1051/jphyscol:1986755

中图分类号：

学科分类号：

摘要：

引用

页码：321 / 326

页数：6

共 13 条

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