NBN FILM DEPOSITION USING OPTICAL-EMISSION SPECTROSCOPY

被引：3

作者：

BHUSHAN, M

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 02期

关键词：

D O I：

10.1109/TMAG.1987.1065013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：843 / 846

页数：4

共 10 条

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[3] PROPERTIES OF NBN THIN-FILMS DEPOSITED ON AMBIENT-TEMPERATURE SUBSTRATES [J].

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[6] OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION [J].

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[8] SUPERCONDUCTING TRANSITION TEMPERATURES OF RF SPUTTERED NBN FILMS [J].

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[9] HIGH-TC SUPERCONDUCTING NBN FILMS DEPOSITED AT ROOM-TEMPERATURE [J].

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[10] EFFECTS OF DEPOSITION PARAMETERS ON THE PROPERTIES OF SUPERCONDUCTING RF REACTIVELY SPUTTERED NBN FILMS [J].

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