FACTORS AFFECTING THE GROWTH OF AN INTEGRATED GA1-XINXAS INP PIN-FET BY MOLECULAR-BEAM EPITAXY

被引:14
作者
SCOTT, EG
WAKE, D
LIVINGSTONE, AW
ANDREWS, DA
DAVIES, GJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 03期
关键词
D O I
10.1116/1.583109
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:816 / 819
页数:4
相关论文
共 13 条
[1]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF INP HOMOEPITAXIAL LAYERS AND THEIR ELECTRICAL AND OPTICAL-PROPERTIES [J].
ASAHI, H ;
KAWAMURA, Y ;
IKEDA, M ;
OKAMOTO, H .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2852-2859
[2]   SATURATION VELOCITY DETERMINATION FOR IN0.53GA0.47AS FIELD-EFFECT TRANSISTORS [J].
BANDY, S ;
NISHIMOTO, C ;
HYDER, S ;
HOOPER, C .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :817-819
[3]  
CHENG KY, 1982, 2ND INT S MOL BEAM E
[4]   ARSENIC STABILIZATION OF INP SUBSTRATES FOR GROWTH OF GAXIN1-XAS LAYERS BY MOLECULAR-BEAM EPITAXY [J].
DAVIES, GJ ;
HECKINGBOTTOM, R ;
OHNO, H ;
WOOD, CEC ;
CALAWA, AR .
APPLIED PHYSICS LETTERS, 1980, 37 (03) :290-292
[5]   THE GROWTH AND CHARACTERIZATION OF NOMINALLY UNDOPED AL1-XINXAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
DAVIES, GJ ;
KERR, T ;
TUPPEN, CG ;
WAKEFIELD, B ;
ANDREWS, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (02) :219-223
[6]   THE EFFECT OF AS-4 OVERPRESSURE ON THE INCORPORATION OF IN INTO AL1-XINXAS GROWN ON (100) INP BY MOLECULAR-BEAM EPITAXY [J].
DAVIES, GJ ;
ANDREWS, DA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (08) :L143-L146
[7]   ELECTROCHEMICAL SULFUR DOPING OF GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
DAVIES, GJ ;
ANDREWS, DA ;
HECKINGBOTTOM, R .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7214-7218
[8]  
FORREST SR, 1982, LASER FOCUS WORLD, V18, P81
[9]   ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF HIGH-PURITY GAINAS USING TRIMETHYLINDIUM [J].
KUO, CP ;
YUAN, JS ;
COHEN, RM ;
DUNN, J ;
STRINGFELLOW, GB .
APPLIED PHYSICS LETTERS, 1984, 44 (05) :550-552
[10]   DEFECTS ASSOCIATED WITH ACCOMMODATION OF MISFIT BETWEEN CRYSTALS [J].
MATTHEWS, JW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :126-133