X-RAY TOPOGRAPHIC OBSERVATION OF DARK-LINE DEFECTS IN GAAS-GA1-XALXAS DOUBLE-HETEROSTRUCTURE WAFERS

被引：12

作者：

KISHINO, S ^{[1
]}

NAKASHIMA, H ^{[1
]}

CHINONE, N ^{[1
]}

ITO, R ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI 185,TOKYO,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1976年 / 28卷 / 02期

关键词：

D O I：

10.1063/1.88655

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：98 / 100

页数：3

共 17 条

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[2]

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[4] DEFECT STRUCTURE OF DEGRADED HETEROJUNCTION GAALAS-GAAS LASERS [J].

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[5] GROWTH OF DARK LINES FROM CRYSTAL DEFECTS IN GAAS-GAALAS DOUBLE HETEROSTRUCTURE CRYSTALS [J].

ITO, R ;

NAKASHIMA, H ;

NAKADA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (08) :1321-1322

[6] DEGRADATION SOURCES IN GAAS-ALGAAS DOUBLE-HETEROSTRUCTURE LASERS [J].

ITO, R ;

NAKASHIMA, H ;

KISHINO, S ;

NAKADA, O .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1975, QE11 (07) :551-556

[7] SIMPLE METHOD FOR OBTAINING LUMINESCENT PATTERN OF DOUBLE HETEROSTRUCTURE CRYSTALS [J].

ITO, R ;

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NAKADA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (08) :1272-1274

[8]

JOHNSON DW, 1973, APPL PHYS LETT, V23, P192

[9] OBSERVATION OF DARK-LINE DEGRADATION SITES IN ALGAAS-GAAS DH LASER MATERIAL BY ETCHING AND PHASE-CONTRAST MICROSCOPY [J].

JOHNSTON, WD ;

CALLAHAN, WM ;

MILLER, BI .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) :505-507

[10] X-RAY TOPOGRAPHIC STUDY OF DARK-SPOT DEFECTS IN GAAS-GA1-XALXAS DOUBLE-HETEROSTRUCTURE WAFERS [J].

KISHINO, S ;

NAKASHIMA, H ;

ITO, R ;

NAKADA, O .

APPLIED PHYSICS LETTERS, 1975, 27 (04) :207-209

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