SPATIALLY RESOLVED OPTICAL SPECTROSCOPY OF PLASMA-ETCHING SYSTEMS

被引：6

作者：

FIELD, D

HYDES, AJ

KLEMPERER, DF

机构：

来源：

VACUUM | 1984年 / 34卷 / 3-4期

关键词：

D O I：

10.1016/0042-207X(84)90065-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：347 / 349

页数：3

共 13 条

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