REVIEW OF OXIDATION PROCESSES IN PLASMAS

被引：39

作者：

FRIEDEL, P

GOURRIER, S

机构：

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 1983年 / 44卷 / 05期

关键词：

D O I：

10.1016/0022-3697(83)90063-X

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

收藏

页码：353 / 364

页数：12

相关论文

共 51 条

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[5] BELL AT, 1974, TECHNIQUES APPLICATI
[6] SOME PROPERTIES OF PLASMA-GROWN GAAS OXIDES
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[7] PLASMA OXIDATION OF GAAS
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[J]. APPLIED PHYSICS LETTERS, 1976, 29 (01) : 56 - 58
[8] MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING
CHANG, RPH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 278 - 280
[9] PLASMA ANODIZATION OF GAAS IN A DC DISCHARGE
CHESLER, LA
ROBINSON, GY
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04): : 1525 - 1529
[10] MECHANISM OF GAAS ANODIZATION
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (02) : 239 - 241

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