CHEMICAL ETCHING OF GAAS

被引：24

作者：

ADACHI, S

OE, K

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 01期

关键词：

D O I：

10.1149/1.2115492

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：126 / 130

页数：5

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