RAPID ISOTHERMAL ANNEALING OF BORON ION-IMPLANTED JUNCTIONS

被引：39

作者：

LASKY, JB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 10期

关键词：

D O I：

10.1063/1.331780

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6009 / 6018

页数：10

共 26 条

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