SPUTTERED W-N DIFFUSION-BARRIERS

被引:107
作者
KATTELUS, HP [1 ]
KOLAWA, E [1 ]
AFFOLTER, K [1 ]
NICOLET, MA [1 ]
机构
[1] CALTECH,PASADENA,CA 91125
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期
关键词
D O I
10.1116/1.572901
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2246 / 2254
页数:9
相关论文
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