REFRACTORY-METAL CONTACTS TO GAAS - INTERFACE CHEMISTRY AND SCHOTTKY-BARRIER FORMATION

被引：41

作者：

WALDROP, JR

KOWALCZYK, SP

GRANT, RW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 02期

关键词：

D O I：

10.1116/1.571795

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：607 / 610

页数：4

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