RF REACTIVELY SPUTTERED TIN - CHARACTERIZATION AND ADHESION TO MATERIALS OF TECHNICAL INTEREST

被引：23

作者：

BUCHER, JP ^{[1
]}

ACKERMANN, KP ^{[1
]}

BUSCHOR, FW ^{[1
]}

机构：

[1] BROWN BOVERI & CIE AG,ANGEW PHYS & MESSTECH LAB,CH-5401 BADEN,SWITZERLAND

来源：

THIN SOLID FILMS | 1984年 / 122卷 / 01期

关键词：

RF SPUTTERING - TITANIUM NITRIDE;

D O I：

10.1016/0040-6090(84)90379-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：63 / 71

页数：9

共 24 条

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[4]

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ARON, PR .

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[7]

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[8] ADHESION AND HARDNESS OF ION-PLATED TIC AND TIN COATINGS [J].

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PERRY, AJ .

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[9] THIN TIN COATINGS DEPOSITED ONTO NODULAR CAST-IRON BY ION-ASSISTED AND PLASMA-ASSISTED COATING TECHNIQUES [J].

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[10]

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