RF REACTIVELY SPUTTERED TIN - CHARACTERIZATION AND ADHESION TO MATERIALS OF TECHNICAL INTEREST

被引:22
作者
BUCHER, JP [1 ]
ACKERMANN, KP [1 ]
BUSCHOR, FW [1 ]
机构
[1] BROWN BOVERI & CIE AG,ANGEW PHYS & MESSTECH LAB,CH-5401 BADEN,SWITZERLAND
关键词
RF SPUTTERING - TITANIUM NITRIDE;
D O I
10.1016/0040-6090(84)90379-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:63 / 71
页数:9
相关论文
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