SILICON-OXIDE ENHANCED SCHOTTKY GATE IN0.53GA0.47AS FETS WITH A SELF-ALIGNED RECESSED GATE STRUCTURE

被引:7
作者
CHENG, CL [1 ]
LIAO, ASH [1 ]
CHANG, TY [1 ]
CARIDI, EA [1 ]
COLDREN, LA [1 ]
LALEVIC, B [1 ]
机构
[1] RUTGERS STATE UNIV, DEPT ELECT ENGN, PISCATAWAY, NJ 08854 USA
关键词
D O I
10.1109/EDL.1984.26008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:511 / 514
页数:4
相关论文
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