STABILITY ANALYSIS OF CORRECTION SCHEMES FOR SPREADING RESISTANCE MEASUREMENTS

被引:4
作者
CLARYSSE, T
VANDERVORST, W
机构
[1] IMEC vzw, B-3030 Leuven
关键词
D O I
10.1016/0038-1101(90)90139-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is illustrated how the stability behaviour of a correction scheme for spreading resistance measurements can be analysed on the basis of its stability curves. This technique is applied on some recent schemes which incorporate a resistivity dependent probe radius. Their behaviour is compared with schemes implementing a fixed radius. From this analysis it follows precisely when the variable radius schemes considered will be stable or unstable. The primary cause for eventual instability is indicated and a new iteration approach is proposed which is able to remove this cause resulting in a drastically improved stability behaviour.
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页码:1587 / 1600
页数:14
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