IMPLANT-DOSE DEPENDENCE OF GRAIN-SIZE AND (110) TEXTURE ENHANCEMENTS IN POLYCRYSTALLINE SI FILMS BY SEED SELECTION THROUGH ION CHANNELING

被引：35

作者：

KUNG, KTY

REIF, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 07期

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D O I：

10.1063/1.336344

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：2422 / 2428

页数：7

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