T1-XALXN COATINGS BY PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION USING A TICL4/ALCL3/N-2/H-2/AR GAS-MIXTURE

被引：14

作者：

KIM, KH

LEE, SH

机构：

[1] Department of Inorganic Materials Engineering, Pusan National University, Pusan

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1995年 / 14卷 / 21期

关键词：

D O I：

10.1007/BF00633152

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1531 / 1533

页数：3

共 13 条

[1] DEFECT STRUCTURE AND PHASE-TRANSITIONS IN EPITAXIAL METASTABLE CUBIC TI0.5AL0.5N ALLOYS GROWN ON MGO(001) BY ULTRA-HIGH-VACUUM MAGNETRON SPUTTER DEPOSITION [J].

ADIBI, F ;

PETROV, I ;

HULTMAN, L ;

WAHLSTROM, U ;

SHIMIZU, T ;

MCINTYRE, D ;

GREENE, JE ;

SUNDGREN, JE .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (09) :6437-6450

[2] OPTIMIZATION OF ARC EVAPORATED (TI,AL)N FILM COMPOSITION FOR CUTTING-TOOL APPLICATIONS [J].

COLL, BF ;

SATHRUM, P ;

FONTANA, R ;

PEYRE, JP ;

DUCHATEAU, D ;

BENMALEK, M .

SURFACE & COATINGS TECHNOLOGY, 1992, 52 (01) :57-64

[3] TIXAL1-XN FILMS DEPOSITED BY ION PLATING WITH AN ARC EVAPORATOR [J].

FRELLER, H ;

HAESSLER, H .

THIN SOLID FILMS, 1987, 153 :67-74

[4]

IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V

[5] MORPHOLOGY AND PROPERTIES OF SPUTTERED (TI,AL)N LAYERS ON HIGH-SPEED STEEL SUBSTRATES AS A FUNCTION OF DEPOSITION TEMPERATURE AND SPUTTERING ATMOSPHERE [J].

JEHN, HA ;

HOFMANN, S ;

RUCKBORN, VE ;

MUNZ, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2701-2705

[6] ON STRUCTURE AND PROPERTIES OF SPUTTERED TI AND AL BASED HARD COMPOUND FILMS [J].

KNOTEK, O ;

BOHMER, M ;

LEYENDECKER, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2695-2700

[7]

KNOTEK O, 1987, J VAC SCI TECHNOL A, V5, P175

[8] (TI1-XALX)N COATINGS BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION [J].

LEE, SH ;

RYOO, HJ ;

LEE, JJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04) :1602-1607

[9] OXIDATION OF METASTABLE SINGLE-PHASE POLYCRYSTALLINE TI0.5AL0.5N FILMS - KINETICS AND MECHANISMS [J].

MCINTYRE, D ;

GREENE, JE ;

HAKANSSON, G ;

SUNDGREN, JE ;

MUNZ, WD .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (03) :1542-1553

[10] COMPARISON OF CUTTING PERFORMANCE OF ION-PLATED NBN, ZRN, TIN AND (TI,AL)N COATINGS [J].

MOLARIUS, JM ;

KORHONEN, AS ;

HARJU, E ;

LAPPALAINEN, R .

SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) :117-132

← 1 2 →