Novel optical features in Cd+ ion-implanted LEC-grown GaAs

被引:4
作者
Kawasumi, Y
Kimura, S
Iida, T
Obara, A
Shibata, H
Kobayashi, N
Tsukamoto, T
Makita, Y
机构
[1] SCI UNIV TOKYO, TOKYO 162, JAPAN
[2] MEIJI UNIV, KAWASAKI, KANAGAWA 214, JAPAN
关键词
D O I
10.1016/0168-583X(95)00754-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
High-energy Cd+ ions were implanted into undoped GaAs grown by the liquid encapsulated Czochralski (LEG) method for a wide Cd concentration, [Cd] between 1x10(16) and 3 x 10(21) cm(-3). Raman scattering spectra indicate that for [Cd] lower than 1.7 x 10(18) cm(-3), the damage induced by high-energy ion-implantation can be eliminated by high-temperature annealing. For [Cd] higher than 3 x 10(18) cm(-3), the intensity of the LO-phonon mode gradually reduces and its width significantly broadens with increasing [Cd]. For [Cd] = 1 x 10(21) and 3 x 10(21) cm(-3), a forbidden mode appears on the lower-frequency side of the LO-phonon mode. The results of Rutherford backscattering spectrometry (RES), and Hall-effect measurements suggest that a solid solution of Cd in GaAs is formed in this high-concentration region. 2 K photoluminescence (PL) spectra indicate that four emissions related with acceptor-acceptor pairs, [g-g], [g-g](2), [g-g](3), and [g-g](beta) are formed in the near band-edge region even by using LEC-GaAs as a substrate. In the energy region far below the band-edge, many emissions associated with vacancies and complexes with doped Cd atoms are produced specifically for high [Cd].
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页码:466 / 470
页数:5
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