X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES ON MODIFIED POLY(ETHYLENE-TEREPHTHALATE) SURFACES AFTER KRF LASER ABLATION

被引:7
作者
KOKAI, F
机构
[1] Laser Laboratory, Institute for Research and Innovation, Kashiwa, Chiba
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 01期
关键词
Ablation; Excimer laser; Poly(ethylene terephthalate); Surface modification; X-ray photoelectron spectroscopy;
D O I
10.1143/JJAP.29.158
中图分类号
O59 [应用物理学];
学科分类号
摘要
The chemical structure of poly(ethylene terephthalate) (PET) surfaces modified by the irradiation of a KrF laser pulse are investigated by X-ray photoelectron spectroscopy. A decrease in oxygen-to-carbon atomic ratio and a change in bonding environment are induced by laser irradiation with a single laser pulse. The ablation is observed at fluences greater than ∼90 mJ/cm2. The observed features along the depth of a created surface are discussed in terms of preferential removal of carboxylic groups in PET molecules and surface oxidation after ablation. © 1990 IOP Publishing Ltd.
引用
收藏
页码:158 / 161
页数:4
相关论文
共 23 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[3]  
BRIGGS D, 1983, PRACTICAL SURFACE AN, P388
[4]  
Briggs D., 1983, PRACTICAL SURFACE AN, P133
[5]   AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF POLY(METHYLMETHACRYLATE) AND POLY(ALPHA-METHYLSTYRENE) SURFACES IRRADIATED BY EXCIMER LASERS [J].
BURRELL, MC ;
LIU, YS ;
COLE, HS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2459-2462
[6]   PHOTOCHEMICAL DEGRADATION OF POLY(ETHYLENE TEREPHTHALATE) .3. DETERMINATION OF DECOMPOSITION PRODUCTS AND REACTION-MECHANISM [J].
DAY, M ;
WILES, DM .
JOURNAL OF APPLIED POLYMER SCIENCE, 1972, 16 (01) :203-&
[7]   EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422
[8]   EFFECTIVE DEEP ULTRAVIOLET PHOTOETCHING OF POLY(METHYL METHACRYLATE BY AN EXCIMER LASER [J].
KAWAMURA, Y ;
TOYODA, K ;
NAMBA, S .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :374-375
[9]   X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES ON MODIFIED POLYIMIDE SURFACES AFTER ABLATION WITH A KRF EXCIMER LASER [J].
KOKAI, F ;
SAITO, H ;
FUJIOKA, T .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :3252-3255
[10]   CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES [J].
LAZARE, S ;
HOH, PD ;
BAKER, JM ;
SRINIVASAN, R .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1984, 106 (15) :4288-4290