DIP-COATING OF SB-DOPED SNO2 FILMS BY ETHANOLAMINE-ALKOXIDE METHOD

Transparent, highly conducting thin Sb-doped Sn02 films have been deposited on glass by a dip-coating method using a solution of tin tetraisopropoxide-triethanolamine-H20-isopropanol. The viscosity of the solution obtained from this system remained constant over 700h. The resistivity of the film depended slightly on film thickness: it was 0.025 Ω cm below 1000A and decreased to a constant value of 0.005 Ω cm above 2000A. Average transmittance of visible light was higher than 95% for undoped films and higher than 80% for Sb-doped films. The coated thin films were very uniform and dense, whereas an OMCVD process formed porous films with an island texture. The advantages and disadvantages of the dip-coating process are discussed in comparison with the OMCVD process. © 1990, The Electrochemical Society, Inc. All rights reserved.