DIELECTRIC-PROPERTIES OF FLUOROCARBON AND CHLOROFLUOROCARBON FILMS PLASMA POLYMERIZED IN AN RF GLOW-DISCHARGE

被引：25

作者：

MARTINU, L

BIEDERMAN, H

NEDBAL, J

机构：

来源：

THIN SOLID FILMS | 1986年 / 136卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90103-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：11 / 19

页数：9

共 27 条

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