THE STATUS OF REFERENCE DATA, REFERENCE MATERIALS AND REFERENCE PROCEDURES IN SURFACE-ANALYSIS

被引：13

作者：

GRANT, JT

WILLIAMS, P

FINE, J

POWELL, CJ

机构：

[1] ARIZONA STATE UNIV,DEPT CHEM,TEMPE,AZ 85287

[2] NBS,DIV SURFACE SCI,GAITHERSBURG,MD 20899

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 13卷 / 01期

关键词：

D O I：

10.1002/sia.740130110

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：46 / 50

页数：5

共 13 条

[1] XPS - ENERGY CALIBRATION OF ELECTRON SPECTROMETERS .1. AN ABSOLUTE, TRACEABLE ENERGY CALIBRATION AND THE PROVISION OF ATOMIC REFERENCE LINE ENERGIES
ANTHONY, MT
SEAH, MP
[J]. SURFACE AND INTERFACE ANALYSIS, 1984, 6 (03) : 95 - 106
[2] FINE J, IN PRESS
[3] LAREAU RT, 1985, APPLIED MATERIALS CH, V48, P273
[4] INSITU IMPLANTATION AND SIMS ANALYSIS OF D IN SI AND NBV USING AN ION MICROPROBE
LOXTON, CM
LADNA, B
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) : 210 - 213
[5] THE DEVELOPMENT OF STANDARDS FOR SURFACE-ANALYSIS
POWELL, CJ
[J]. SURFACE AND INTERFACE ANALYSIS, 1988, 11 (1-2) : 103 - 109
[6] CALIBRATION OF AUGER-ELECTRON SPECTROMETERS FOR ENERGY AND INTENSITY MEASUREMENT
SEAH, MP
SMITH, GC
ANTHONY, MT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1221 - 1222
[7] DATA COMPILATIONS - THEIR USE TO IMPROVE MEASUREMENT CERTAINTY IN SURFACE-ANALYSIS BY AES AND XPS
SEAH, MP
[J]. SURFACE AND INTERFACE ANALYSIS, 1986, 9 (1-6) : 85 - 98
[8] ONLINE ION-IMPLANTATION FOR QUANTIFICATION IN SECONDARY ION MASS-SPECTROMETRY - DETERMINATION OF TRACE CARBON IN THIN-LAYERS OF SILICON
SMITH, HE
MORRISON, GH
[J]. ANALYTICAL CHEMISTRY, 1985, 57 (13) : 2663 - 2668
[9] QUANTITATIVE-ANALYSIS OF CHEMICAL VAPOR-DEPOSITION REFRACTORY-METAL SILICIDES
STREIT, LA
WILLIAMS, P
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1979 - 1983
[10] WAGNER CD, IN PRESS J PHYS CHEM

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