SPATIAL-RESOLUTION TESTS OF SCANNING AUGER MICROSCOPY UNDER DIFFERENT TOPOGRAPHICAL CONDITIONS

被引：23

作者：

UMBACH, A

HOYER, A

BRUNGER, WH

机构：

[1] FRAUNHOFER INST MIKROSTRUKTURTECH,DILLENBURGER STR 53,D-1000 BERLIN 33,FED REP GER

[2] TECH UNIV BERLIN,INST FESTKORPERPHYS,D-1000 BERLIN 12,FED REP GER

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 6-7期

关键词：

D O I：

10.1002/sia.740140618

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：401 / 406

页数：6

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