EFFECT OF THE ANNEALING CONDITIONS ON THE ELECTRICAL CHARACTERISTICS OF P+/N SHALLOW JUNCTIONS

被引：17

作者：

SOLMI, S

LANDI, E

NEGRINI, P

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1984年 / 5卷 / 09期

关键词：

D O I：

10.1109/EDL.1984.25946

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：359 / 361

页数：3

共 13 条

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