THE USE OF ELASTIC RECOIL DETECTION FOR STOICHIOMETRY DETERMINATION OF REACTIVELY EVAPORATED TIN LAYERS

被引：1

作者：

GAGNON, G

CURRIE, JF

BREBNER, JL

GUJRATHI, SC

OUELLET, L

机构：

[1] ECOLE POLYTECH,DEPT GENIE PHYS,COUCHES MINCES GRP,MONTREAL H3C 3A7,QUEBEC,CANADA

[2] VARIAN ASSOCIATES INC,EDWARD L GINZTON RES CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 06期

关键词：

D O I：

10.1063/1.354429

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin TiN layers have been successfully produced by reactive evaporation combined with rapid thermal annealing. Their stoichiometry as a function of depth has been measured by elastic recoil detection combined with time-of-flight. It is shown that this technique is the most appropriate for stoichiometry determination of TiN layers.

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页码：4233 / 4235

页数：3

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