THE FABRICATION OF TIN FILMS BY REACTIVE EVAPORATION AND RAPID THERMAL ANNEALING

被引：16

作者：

REPETA, M

DIGNARDBAILEY, L

CURRIE, JF

BREBNER, JL

BARLA, K

机构：

[1] UNIV MONTREAL,DEPT PHYS,COUCHES MINCES GRP,CP 6128,SUCC A MONTREAL,MONTREAL H3R 2B6,QUEBEC,CANADA

[2] CTR NATL ETUD TELECOMMUN,CTR NORBERT SEGARD,F-38243 MEYLAN,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 08期

关键词：

D O I：

10.1063/1.340980

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2796 / 2799

页数：4

共 13 条

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[7] TITANIUM NITRIDE SCHOTTKY-BARRIER CONTACTS TO GAAS [J].

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[10]

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