HYDROGENATION OF SILICON-NITRIDE AND SILICON OXYNITRIDE FILMS DEPOSITED BY REACTIVE SPUTTERING - OPTICAL-PROPERTIES

被引：7

作者：

SCHALCH, D

SCHARMANN, A

WOLFRAT, R

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 100卷 / 01期

关键词：

D O I：

10.1002/pssa.2211000164

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K87 / K92

页数：6

共 12 条

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[8] THE ROLE OF HYDROGEN IN SILICON-NITRIDE AND SILICON OXYNITRIDE FILMS [J].

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[9]

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