THE ROLE OF HYDROGEN IN SILICON-NITRIDE AND SILICON OXYNITRIDE FILMS

被引：33

作者：

SCHALCH, D

SCHARMANN, A

WOLFRAT, R

机构：

来源：

THIN SOLID FILMS | 1985年 / 124卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90280-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：301 / 308

页数：8

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