GAUGE FACTOR MEASUREMENTS FOR FLUOROCARBON POLYMER GOLD-FILMS

被引：5

作者：

THURSTANS, RE ^{[1
]}

TAYLOR, AG ^{[1
]}

OXLEY, DP ^{[1
]}

BIEDERMAN, H ^{[1
]}

MARTINU, L ^{[1
]}

机构：

[1] CHARLES UNIV,FAC MATH & PHYS,CS-18000 PRAGUE 8,CZECHOSLOVAKIA

来源：

VACUUM | 1985年 / 35卷 / 06期

关键词：

D O I：

10.1016/0042-207X(85)90393-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：219 / 221

页数：3

共 16 条

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[10] METAL DOPED POLYMER-FILMS PREPARED BY SIMULTANEOUS PLASMA POLYMERIZATION OF TETRAFLUOROMETHANE AND EVAPORATION OF GOLD [J].

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VACUUM, 1985, 35 (4-5) :171-176

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