IONIZED MG DOPING IN MOLECULAR-BEAM EPITAXY OF GAAS

被引:19
作者
MANNOH, M [1 ]
NOMURA, Y [1 ]
SHINOZAKI, K [1 ]
MIHARA, M [1 ]
ISHII, M [1 ]
机构
[1] OPTOELECTR JOINT RES LAB,NAKAHARA KU,KAWASAKI 211,JAPAN
关键词
D O I
10.1063/1.336545
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1092 / 1095
页数:4
相关论文
共 26 条
  • [1] MODEL-CALCULATIONS FOR ACCELERATED AS ION DOPING OF SI DURING MOLECULAR-BEAM EPITAXY
    BAJOR, G
    GREENE, JE
    [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) : 1579 - 1582
  • [2] SN ION DOPING DURING GAAS MBE WITH FIELD-ION GUN
    BAMBA, Y
    MIYAUCHI, E
    KURAMOTO, K
    TAKAMORI, A
    FURUYA, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (06): : L331 - L332
  • [3] LUMINESCENT P-GAAS GROWN BY ZINC ION DOPED MBE
    BEAN, JC
    DINGLE, R
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (12) : 925 - 927
  • [4] DEEP STATES IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY
    BLOOD, P
    HARRIS, JJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) : 993 - 1007
  • [5] THE INTERACTION OF LOW-ENERGY ION-BEAMS WITH SURFACES
    CARTER, G
    ARMOUR, DG
    [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 13 - 30
  • [6] Casey H.C., 1973, ATOMIC DIFFUSION SEM, P351
  • [7] BERYLLIUM AND SILICON DOPING STUDIES IN ALXGA1-XAS AND NEW RESULTS ON PERSISTENT PHOTOCONDUCTIVITY
    CHAND, N
    FISCHER, R
    KLEM, J
    HENDERSON, T
    PEARAH, P
    MASSELINK, WT
    CHANG, YC
    MORKOC, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02): : 644 - 648
  • [8] MAGNESIUM-DOPED GAAS AND ALXGA1-XAS BY MOLECULAR-BEAM EPITAXY
    CHO, AY
    PANISH, MB
    [J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 5118 - 5123
  • [9] THE USE OF ION-BEAMS IN MOLECULAR-BEAM EPITAXY
    FARROW, RFC
    [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 197 - 211
  • [10] GIBBONS JF, 1975, PROJECTED RANGE STAT