CODEPOSITED SILICIDES IN VERY-LARGE-SCALE INTEGRATION

被引：11

作者：

MURARKA, SP

机构：

来源：

THIN SOLID FILMS | 1986年 / 140卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90157-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：35 / 50

页数：16

共 49 条

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[16]

KAMMERDINER L, 1984, 2 SIL WORKSH SAN JUA

[17]

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[18]

LEMAY V, 1984, THESIS MIT

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LLOYD EJ, 1984, COMMUNICATION

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