DIFFUSE-X-RAY SCATTERING FROM NONIDEAL PERIODICAL CRYSTALLINE MULTILAYERS

被引：11

作者：

HOLY, V

机构：

[1] Department of Solid State Physics, Faculty of Science, The Masaryk University, Brno, 611 37

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1994年 / 58卷 / 03期

关键词：

D O I：

10.1007/BF00324373

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Kinematical theory of X-ray diffraction in statistically disturbed crystals is used for the description of X-ray diffraction in multilayers containing random structural defects. The method makes it possible to calculate the distribution of diffusely scattered intensity near a non-zero reciprocal lattice point as well as rocking curves measured by double crystal diffractometry. The general approach is applied to multilayers with mosaic structure as well as to multilayers with randomly rough interfaces and diffuse X-ray scattering intensities are calculated for various values of defect parameters. The possibility is shown to distinguish the influence of the interface roughness on the diffuse X-ray scattering from that of mosaic structure. The influence of non-random strain profiles on the diffuse scattering intensity distribution is discussed.

引用

页码：173 / 180

页数：8

共 16 条

[1] X-RAY ROCKING CURVE CHARACTERIZATION OF ZNTE LAYERS GROWN ON GAAS BY HOT-WALL EPITAXY [J].