INTERFACIAL CHEMISTRY EFFECTS ON THE ADHESION OF SPUTTER-DEPOSITED TIC FILMS TO STEEL SUBSTRATES

被引：43

作者：

PAN, A

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[2] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[3] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

THIN SOLID FILMS | 1982年 / 97卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90419-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：79 / 89

页数：11

共 13 条

[1] MEASUREMENT OF ADHESION OF THIN FILMS [J].

BENJAMIN, P ;

WEAVER, C .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277) :163-176

[2] TECHNIQUE FOR DETECTING CRITICAL LOADS IN SCRATCH TEST FOR THIN-FILM ADHESION [J].

GREENE, JE ;

WOODHOUSE, J ;

PESTES, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (06) :747-749

[3] ADHESION OF SPUTTER-DEPOSITED CARBIDE FILMS TO STEEL SUBSTRATES [J].

GREENE, JE ;

PESTES, M .

THIN SOLID FILMS, 1976, 37 (03) :373-385

[4] NATURE OF TRANSITION REGION FORMED BETWEEN DC-BASES RF SPUTTERED TIC FILMS AND STEEL SUBSTRATES [J].

GREENE, JE ;

ZILKO, JL .

SURFACE SCIENCE, 1978, 72 (01) :109-124

[5] STRESS FIELD CREATED BY A CIRCULAR SLIDING CONTACT [J].

HAMILTON, GM ;

GOODMAN, LE .

JOURNAL OF APPLIED MECHANICS, 1966, 33 (02) :371-&

[6] SOME FACTORS INFLUENCING THE ADHESION OF FILMS PRODUCED BY VACUUM EVAPORATION [J].

HEAVENS, OS .

JOURNAL DE PHYSIQUE ET LE RADIUM, 1950, 11 (07) :355-360

[7] TEMPERATURE RISE DURING FILM DEPOSITION BY RF AND DC SPUTTERING [J].

LAU, SS ;

MILLS, RH ;

MUTH, DG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (04) :1196-&

[8] INFLUENCE OF AR SPUTTERING PRESSURE ON ADHESION OF TIC FILMS TO STEEL SUBSTRATES [J].

MUKHERJEE, JL ;

WU, LC ;

GREENE, JE ;

COOK, HE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04) :850-853

[9] RESIDUAL COMPRESSIVE STRESS IN SPUTTER-DEPOSITED TIC FILMS ON STEEL SUBSTRATES [J].

PAN, A ;

GREENE, JE .

THIN SOLID FILMS, 1981, 78 (01) :25-34

[10]

Williams, 1971, PROGR SOLID STATE CH, V6, P57, DOI DOI 10.1016/0079-6786(71)90028-8

← 1 2 →