RESIDUAL COMPRESSIVE STRESS IN SPUTTER-DEPOSITED TIC FILMS ON STEEL SUBSTRATES

被引：90

作者：

PAN, A

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

THIN SOLID FILMS | 1981年 / 78卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90414-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：25 / 34

页数：10

共 17 条

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