Monolithic GaAs impatt diodes were developed as cw power sources at 60 GHz using double-drift flat-profile structures prepared by MBE. Two mesa-type diodes were employed to excite a microstrip resonator produced on the same chip as the diodes. The oscillation frequency was determined by the microstrip dimensions and the diode locations rather than by external circuitry. 1. 2 w was obtained at 60 GHz with 8. 5% efficiency, and a maximum efficiency of 10% was obtained at 58. 5 GHz with 1. 1 w output power without the use of diamond heat sinks.