FABRICATION OF LOW DARK-CURRENT PLANAR PHOTODIODES USING AN OPEN-TUBE METHOD FOR ZN DIFFUSION INTO INP AND IN0.53GA0.47AS

被引：7

作者：

CAMLIBEL, I

CHIN, AK

GUGGENHEIM, H

SINGH, S

VANUITERT, LG

ZYDZIK, GJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 07期

关键词：

D O I：

10.1149/1.2115938

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1687 / 1688

页数：2

共 10 条

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