OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS SI1-XGEX ALLOY THIN-FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING

被引：18

作者：

SAITO, N

AOKI, K

SANNOMIYA, H

YAMAGUCHI, T

机构：

来源：

THIN SOLID FILMS | 1984年 / 115卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90088-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：253 / 262

页数：10

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