THE LATTICE LOCATIONS OF SILICON IMPURITIES IN GAAS - EFFECTS DUE TO STOICHIOMETRY, THE FERMI ENERGY, THE SOLUBILITY LIMIT AND DX BEHAVIOR

被引:72
作者
NEWMAN, RC
机构
[1] Blackett Lab., Imperial Coll. of Sci., Technol. and Med., London
关键词
D O I
10.1088/0268-1242/9/10/001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An outline of infrared localized vibrational mode absorption spectroscopy relevant to silicon impurities in GaAs is presented. Absorption lines from Si(Ga) donors, Si(As) acceptors, Si(Ga)-Si(As) pairs, Si(Ga)-V(Ga) (Ga vacancy) pairs and a complex Si-X (involving Si(As) and V(Ga)) have been identified as well as lines from Si(Ga)-Cu(Ga), Si(Ga)-H, Si(As)-H and Si(Ga)-B(As) pairs. These observations are related to the electrical properties of n-type Bridgman, liquid-encapsulated Czochralski and molecular beam epitaxial (MBE) (001) GaAs, and to p-type liquid phase epitaxial and MBE (111)A layers. The discussion relates to dynamic site switching, effects due to counter-doping with shallow acceptors, the solubility of silicon, and DX behaviour observed in homogeneously doped material and proposed for delta-doped MBE (001) layers. The major problem is to understand the processes that limit the maximum carrier concentration that can be achieved in n-type crystals.
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页码:1749 / 1762
页数:14
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