SYNTHESIS AND STRUCTURE OF CHEMICALLY VAPOR-DEPOSITED BORON-NITRIDE

被引：97

作者：

MATSUDA, T ^{[1
]}

UNO, N ^{[1
]}

NAKAE, H ^{[1
]}

HIRAI, T ^{[1
]}

机构：

[1] TOHOKU UNIV,IRON STEEL & OTHER MET RES INST,SENDAI,MIYAGI 980,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE | 1986年 / 21卷 / 02期

关键词：

D O I：

10.1007/BF01145537

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：649 / 658

页数：10

相关论文

共 47 条

[31] NAKAMURA S, 1966, NAGOYA KOGYO SHIKENJ, V15, P205
[32] CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE .1. PREPARATION AND SOME PROPERTIES
NIIHARA, K
HIRAI, T
[J]. JOURNAL OF MATERIALS SCIENCE, 1976, 11 (04) : 593 - 603
[33] AN X-RAY STUDY OF BORON NITRIDE
PEASE, RS
[J]. ACTA CRYSTALLOGRAPHICA, 1952, 5 (03): : 356 - &
[34] BORON-NITRIDE COMPOSITES BY CHEMICAL VAPOR-DEPOSITION
PIERSON, HO
[J]. JOURNAL OF COMPOSITE MATERIALS, 1975, 9 (JUL) : 228 - 240
[35] PREPARATION AND PROPERTIES OF THIN FILM BORON NITRIDE
RAND, MJ
ROBERTS, JF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (04) : 423 - &
[36] CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS OF BN ONTO FUSED-SILICA AND SAPPHIRE
SANO, M
AOKI, M
[J]. THIN SOLID FILMS, 1981, 83 (02) : 247 - 251
[37] FORMATION OF CUBIC BORON-NITRIDE FILMS BY BORON EVAPORATION AND NITROGEN ION-BEAM BOMBARDMENT
SATOU, M
FUJIMOTO, F
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (03): : L171 - L172
[38] ION-BEAM SYNTHESIS OF CUBIC BORON-NITRIDE
SHANFIELD, S
WOLFSON, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 323 - 325
[39] SHIFF D, 1962, MET ENG Q, V2, P32
[40] DEPOSITION OF WURTZITE TYPE BORON-NITRIDE LAYERS BY REACTIVE PULSE PLASMA CRYSTALLIZATION
SOKOLOWSKI, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1979, 46 (01) : 136 - 138

← 1 2 3 4 5 →