ENHANCEMENT OF LATERAL SOLID-PHASE EPITAXIAL-GROWTH IN EVAPORATED AMORPHOUS SI FILMS BY PHOSPHORUS IMPLANTATION

被引：33

作者：

YAMAMOTO, H

ISHIWARA, H

FURUKAWA, S

机构：

[1] Tokyo Inst of Technology, Dep of, Applied Electronics, Yokohama, Jpn, Tokyo Inst of Technology, Dep of Applied Electronics, Yokohama, Jpn

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 03期

关键词：

D O I：

10.1063/1.95653

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

7

引用

收藏

页码：268 / 270

页数：3

相关论文

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