IMPURITY-MEDIATED ONE-DIMENSIONAL CRYSTALLIZATION OF THIN AMORPHOUS-GE FILMS ON SI(111)

被引:5
作者
HELLMAN, O
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP, BASIC RES LABS, ATSUGI, KANAGAWA 24301, JAPAN
[2] ELECTROTECH LAB, TSUKUBA, IBARAKI 305, JAPAN
关键词
D O I
10.1063/1.357384
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have observed peculiar low temperature crystallization dynamics of thin amorphous Ge films deposited on Si (111):7X7 substrates. The one-dimensional geometry and low temperature kinetics of this crystallization indicate an impurity mediated mechanism similar to that suggested by Nygren, McCallum, Thornton, Williams, and Olson [Mater. Res. Soc. Symp. Proc. 100, 403 (1988)]. Interaction is observed between the buried surface structure and the crystallizing Ge film, in some cases resulting in Ge which grows epitaxially not on the bulk Si, but on the 7X7 reconstruction, effectively a two-dimensional substrate.
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页码:3818 / 3822
页数:5
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