PHASE-SELECTIVE CHEMICAL VAPOR-DEPOSITION OF BORON-CARBIDE BY NUCLEATION CONTROL ON PATTERNED SUBSTRATES

被引：7

作者：

JANSSON, U

CARLSSON, JO

MARKERT, LC

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576330

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3172 / 3175

页数：4

共 8 条

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[2] CARLSSON JO, 1985, 8TH P INT C VACUUM M, P287
[3] AREA SELECTIVE CHEMICAL VAPOR-DEPOSITION OF BORON-CARBIDE ACHIEVED BY MOLECULAR MASKING
JANSSON, U
CARLSSON, JO
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1733 - 1735
[4] INITIAL-STAGES OF GROWTH DURING BORON-CARBIDE CHEMICAL VAPOR-DEPOSITION
JANSSON, U
CARLSSON, JO
STRIDH, B
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05): : 2823 - 2828
[5] CHEMICAL VAPOR-DEPOSITION OF BORON CARBIDES .1. PHASE AND CHEMICAL-COMPOSITION
JANSSON, U
CARLSSON, JO
STRIDH, B
SODERBERG, S
OLSSON, M
[J]. THIN SOLID FILMS, 1989, 172 (01) : 81 - 93
[6] JANSSON U, UNPUB
[7] CHEMICAL VAPOR-DEPOSITION OF BORON CARBIDES .2. MORPHOLOGY AND MICROSTRUCTURE
OLSSON, M
SODERBERG, S
STRIDH, B
JANSSON, U
CARLSSON, JO
[J]. THIN SOLID FILMS, 1989, 172 (01) : 95 - 109
[8] Slack G A, 1987, 9TH P INT S BOR BOR, P132