INFLUENCE OF TEMPERATURE ON THE CRYSTAL HABIT OF SILICON IN THE SI-H-CL CVD SYSTEM .1. EXPERIMENTAL RESULTS

被引：34

作者：

GARDENIERS, JGE

MAAS, WEJR

VANMEERTEN, RZC

GILING, LJ

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 96卷 / 04期

关键词：

D O I：

10.1016/0022-0248(89)90642-8

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：821 / 831

页数：11

共 19 条

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