PHOTOCHEMICAL DEPOSITION OF SN FOR USE IN MOLECULAR-BEAM EPITAXY OF GAAS

被引：8

作者：

KOWALCZYK, SP

MILLER, DL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.582980

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1534 / 1538

页数：5

共 24 条

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[7]

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[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J].

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