APPLICATION OF POROUS SILICON AS A SACRIFICIAL LAYER

被引：42

作者：

LANG, W ^{[1
]}

STEINER, P ^{[1
]}

RICHTER, A ^{[1
]}

MARUSCZYK, K ^{[1
]}

WEIMANN, G ^{[1
]}

SANDMAIER, H ^{[1
]}

机构：

[1] TECH UNIV MUNICH,WALTER SCHOTTKY INST,W-8046 GARCHING,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00655-N

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using porous silicon as a sacrificial layer a surface micromachining (SMM) process with a large distance from the structure to the substrate is realized. The application of this process for making free standing structures of polysilicon and flow channels is described.

引用

页码：239 / 242

页数：4

共 9 条

[1] AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE FORMATION AND MICROSTRUCTURE OF POROUS SILICON [J].

BEALE, MIJ ;

BENJAMIN, JD ;

UREN, MJ ;

CHEW, NG ;

CULLIS, AG .

JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) :622-636

[2]

Bomchil G., 1988, Microelectronic Engineering, V8, P293, DOI 10.1016/0167-9317(88)90022-6

[3]

Branebjerg J., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P221, DOI 10.1109/MEMSYS.1991.114800

[4]

CANHAM LT, 1991, APPL PHYS LETT, V59, P304

[5] VISIBLE ELECTROLUMINESCENCE FROM POROUS SILICON [J].

KOSHIDA, N ;

KOYAMA, H .

APPLIED PHYSICS LETTERS, 1992, 60 (03) :347-349

[6] LIGHT-EMITTING-DIODES IN POROUS SILICON [J].

KOZLOWSKI, F ;

STEINER, P ;

LANG, W ;

SANDMAIER, H .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :153-156

[7] POROUS SILICON FORMATION - A QUANTUM WIRE EFFECT [J].

LEHMANN, V ;

GOSELE, U .

APPLIED PHYSICS LETTERS, 1991, 58 (08) :856-858

[8] CURRENT-INDUCED LIGHT-EMISSION FROM A POROUS SILICON DEVICE [J].

RICHTER, A ;

STEINER, P ;

KOZLOWSKI, F ;

LANG, W .

IEEE ELECTRON DEVICE LETTERS, 1991, 12 (12) :691-692

[9] POROUS SILICON FORMATION MECHANISMS [J].

SMITH, RL ;

COLLINS, SD .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (08) :R1-R22

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