APPLICATION OF POROUS SILICON AS A SACRIFICIAL LAYER

被引：41

作者：

LANG, W ^{[1
]}

STEINER, P ^{[1
]}

RICHTER, A ^{[1
]}

MARUSCZYK, K ^{[1
]}

WEIMANN, G ^{[1
]}

SANDMAIER, H ^{[1
]}

机构：

[1] TECH UNIV MUNICH,WALTER SCHOTTKY INST,W-8046 GARCHING,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00655-N

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using porous silicon as a sacrificial layer a surface micromachining (SMM) process with a large distance from the structure to the substrate is realized. The application of this process for making free standing structures of polysilicon and flow channels is described.

引用

页码：239 / 242

页数：4

共 9 条

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