A NEW HEMISPHERICAL RETARDING-FIELD ENERGY ANALYZER FOR QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM

被引：21

作者：

NAKAMAE, K

FUJIOKA, H

URA, K

机构：

[1] Osaka Univ, Electron Beam Lab,, Suita, Jpn, Osaka Univ, Electron Beam Lab, Suita, Jpn

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1985年 / 18卷 / 05期

关键词：

ELECTRIC MEASUREMENTS - Voltage - MICROSCOPES; ELECTRON; -; Applications;

D O I：

10.1088/0022-3735/18/5/017

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new retarding field energy analyzer for quantitative voltage measurements which functionally connects a uniform extracting field with a hemispherical analyzing field is described. The design principles are: (i) the centers of the hemispherical grids are to be put on the virtual source from which the secondary electron seems to come straight ahead; (ii) the radii of the hemispherical grids are to be chosen as large as possible within a restricted working distance in a scanning electron microscope; (iii) all the analyzed secondary electrons are to be collected. The accuracy of the voltage measurement has been improved by a factor of 10 compared with that in the plane-parallel retarding field energy analyzer.

引用

页码：437 / 443

页数：7

共 19 条

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