STUDY OF THE ETCH-STOP MECHANISM IN SILICON

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[62] ANODIC FORMATION OF OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (04) : 230 - 236

[63] SEIPT M, 1959, Z NATURFORSCH PT A, V14, P926

[64] BREAKDOWN IN SILICON-OXIDE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (05): : 1122 - 1130

[65] SEMICONDUCTOR MODEL OF THE PASSIVE LAYER ON IRON ELECTRODES AND ITS APPLICATION TO ELECTROCHEMICAL REACTIONS [J]. ELECTROCHIMICA ACTA, 1979, 24 (08) : 859 - 869

[66] OPTICAL EVIDENCE FOR A SILICON-SILICON OXIDE INTERLAYER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (01) : 131 - 134

[67] TOMASHOV ND, 1966, THEORY CORROSION PRO, pCH13

[68] ON THE MECHANISM OF CHEMICALLY ETCHING GERMANIUM AND SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (10) : 810 - 816

[69] THE ANODE BEHAVIOR OF GERMANIUM IN AQUEOUS SOLUTIONS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1956, 103 (04) : 252 - 256

[70] UHLIG HH, 1978, PASSIVITY METALS, P1

[61] ANODIC OXIDE FILMS FOR DEVICE FABRICATION IN SILICON .1. THE CONTROL LED INCORPORATION OF PHOSPHORUS INTO ANODIC OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (06) : 682 - 688

[62] ANODIC FORMATION OF OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (04) : 230 - 236

[63] SEIPT M, 1959, Z NATURFORSCH PT A, V14, P926

[64] BREAKDOWN IN SILICON-OXIDE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (05): : 1122 - 1130

[65] SEMICONDUCTOR MODEL OF THE PASSIVE LAYER ON IRON ELECTRODES AND ITS APPLICATION TO ELECTROCHEMICAL REACTIONS [J]. ELECTROCHIMICA ACTA, 1979, 24 (08) : 859 - 869

[66] OPTICAL EVIDENCE FOR A SILICON-SILICON OXIDE INTERLAYER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (01) : 131 - 134

[67] TOMASHOV ND, 1966, THEORY CORROSION PRO, pCH13

[68] ON THE MECHANISM OF CHEMICALLY ETCHING GERMANIUM AND SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (10) : 810 - 816

[69] THE ANODE BEHAVIOR OF GERMANIUM IN AQUEOUS SOLUTIONS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1956, 103 (04) : 252 - 256

[70] UHLIG HH, 1978, PASSIVITY METALS, P1