共 13 条
[1]
INSITU CLEANING OF SILICON SUBSTRATE SURFACES BY REMOTE PLASMA-EXCITED HYDROGEN
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1989, 7 (04)
:621-626
[2]
ARCHER VD, 1982, J ELECTROCHEM SOC, P2074
[3]
BREAUX L, 1989, MAR ADV MAT C DENV
[8]
HYDROGEN PLASMA INDUCED DEFECTS IN SILICON
[J].
APPLIED PHYSICS LETTERS,
1988, 53 (18)
:1735-1737