ION-BEAM MODIFICATION OF MOSX FILMS ON METALS

被引：15

作者：

MIKKELSEN, NJ

SORENSEN, G

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷

关键词：

D O I：

10.1016/0921-5093(89)90701-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：343 / 347

页数：5

共 12 条

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[10] FRICTION AND WEAR MEASUREMENTS OF SPUTTERED MOSX FILMS AMORPHIZED BY ION-BOMBARDMENT [J].

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APPLIED PHYSICS LETTERS, 1988, 52 (14) :1130-1132

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